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Class: AtomicLayerDeposition

Catalyst preparation by atomic layer deposition (ALD): sequential

self-limiting surface reactions deposit a conformal thin film

of active phase onto a substrate.

URI: coremeta4cat:AtomicLayerDeposition

 classDiagram
    class AtomicLayerDeposition
    click AtomicLayerDeposition href "../../classes/AtomicLayerDeposition/"
      PreparationMethod <|-- AtomicLayerDeposition
        click PreparationMethod href "../../classes/PreparationMethod/"

      AtomicLayerDeposition : carrier_gas

      AtomicLayerDeposition : deposition_temperature

      AtomicLayerDeposition : description

      AtomicLayerDeposition : number_of_cycles

      AtomicLayerDeposition : pulse_time

      AtomicLayerDeposition : purging_duration

      AtomicLayerDeposition : rdf_type





        AtomicLayerDeposition --> "0..1 _recommended_" DefinedTerm : rdf_type
        click DefinedTerm href "../../classes/DefinedTerm/"



      AtomicLayerDeposition : substrate

      AtomicLayerDeposition : title

      AtomicLayerDeposition : type





        AtomicLayerDeposition --> "0..1" DefinedTerm : type
        click DefinedTerm href "../../classes/DefinedTerm/"

Inheritance

Slots

Name Cardinality and Range Description Inheritance
substrate *
String		 Substrate material on which the ALD film is deposited. direct
pulse_time *
Float		 Duration of the precursor pulse in each ALD cycle. direct
purging_duration *
Float		 Duration of the purge step between ALD pulses. direct
number_of_cycles *
Integer		 Number of repeated cycles in a process (e.g. ALD cycles, impregnation cycles). direct
deposition_temperature *
Float		 Temperature during the deposition step. direct
carrier_gas *
String		 Carrier gas used in a process (e.g. in GC analysis or ALD deposition). direct
title 0..1
String		 This slot is described in more detail within the class in which it is used. Plan
description 0..1
String		 This slot is described in more detail within the class in which it is used. Plan
type 0..1
DefinedTerm		 This slot is described in more detail within the class in which it is used. ClassifierMixin
rdf_type 0..1 recommended
DefinedTerm		 The slot to specify the ontology class that is instantiated by an entity. ClassifierMixin

Identifier and Mapping Information

Schema Source

  • from schema: https://w3id.org/nfdi4cat/coremeta4cat

Mappings

Mapping Type Mapped Value
self coremeta4cat:AtomicLayerDeposition
native coremeta4cat:AtomicLayerDeposition

LinkML Source

Direct

name: AtomicLayerDeposition
description: 'Catalyst preparation by atomic layer deposition (ALD): sequential

  self-limiting surface reactions deposit a conformal thin film

  of active phase onto a substrate.'
from_schema: https://w3id.org/nfdi4cat/coremeta4cat
is_a: PreparationMethod
slots:
- substrate
- pulse_time
- purging_duration
- number_of_cycles
- deposition_temperature
- carrier_gas
class_uri: coremeta4cat:AtomicLayerDeposition

Induced

name: AtomicLayerDeposition
description: 'Catalyst preparation by atomic layer deposition (ALD): sequential

  self-limiting surface reactions deposit a conformal thin film

  of active phase onto a substrate.'
from_schema: https://w3id.org/nfdi4cat/coremeta4cat
is_a: PreparationMethod
attributes:
  substrate:
    name: substrate
    description: Substrate material on which the ALD film is deposited.
    from_schema: https://w3id.org/nfdi4cat/coremeta4cat
    rank: 1000
    slot_uri: VOC4CAT:0000024
    alias: substrate
    owner: AtomicLayerDeposition
    domain_of:
    - AtomicLayerDeposition
    range: string
    multivalued: true
  pulse_time:
    name: pulse_time
    description: Duration of the precursor pulse in each ALD cycle.
    from_schema: https://w3id.org/nfdi4cat/coremeta4cat
    rank: 1000
    slot_uri: coremeta4cat:pulse_time
    alias: pulse_time
    owner: AtomicLayerDeposition
    domain_of:
    - AtomicLayerDeposition
    range: float
    multivalued: true
    unit:
      ucum_code: s
  purging_duration:
    name: purging_duration
    description: Duration of the purge step between ALD pulses.
    from_schema: https://w3id.org/nfdi4cat/coremeta4cat
    rank: 1000
    slot_uri: VOC4CAT:0000112
    alias: purging_duration
    owner: AtomicLayerDeposition
    domain_of:
    - AtomicLayerDeposition
    range: float
    multivalued: true
    unit:
      ucum_code: s
  number_of_cycles:
    name: number_of_cycles
    description: Number of repeated cycles in a process (e.g. ALD cycles, impregnation
      cycles).
    from_schema: https://w3id.org/nfdi4cat/coremeta4cat
    rank: 1000
    slot_uri: coremeta4cat:number_of_cycles
    alias: number_of_cycles
    owner: AtomicLayerDeposition
    domain_of:
    - CalcinationMixin
    - AtomicLayerDeposition
    - MolecularSynthesis
    - XRayAbsorptionSpectroscopy
    - CyclicVoltammetry
    range: integer
    multivalued: true
  deposition_temperature:
    name: deposition_temperature
    description: Temperature during the deposition step.
    from_schema: https://w3id.org/nfdi4cat/coremeta4cat
    rank: 1000
    slot_uri: coremeta4cat:deposition_temperature
    alias: deposition_temperature
    owner: AtomicLayerDeposition
    domain_of:
    - AtomicLayerDeposition
    - DepositionPrecipitation
    range: float
    multivalued: true
    unit:
      ucum_code: Cel
  carrier_gas:
    name: carrier_gas
    description: Carrier gas used in a process (e.g. in GC analysis or ALD deposition).
    from_schema: https://w3id.org/nfdi4cat/coremeta4cat
    rank: 1000
    slot_uri: coremeta4cat:carrier_gas
    alias: carrier_gas
    owner: AtomicLayerDeposition
    domain_of:
    - AtomicLayerDeposition
    - ElementalAnalysis
    - ElectroSprayIonizationMassSpectrometry
    - GCMS
    range: string
    multivalued: true
  title:
    name: title
    description: This slot is described in more detail within the class in which it
      is used.
    from_schema: https://w3id.org/nfdi4cat/coremeta4cat
    rank: 1000
    slot_uri: dcterms:title
    alias: title
    owner: AtomicLayerDeposition
    domain_of:
    - Activity
    - AgenticEntity
    - Any
    - Attribution
    - Catalogue
    - CatalogueRecord
    - ChecksumAlgorithm
    - Concept
    - ConceptScheme
    - DataService
    - Dataset
    - DatasetSeries
    - DefinedTerm
    - Distribution
    - Document
    - Entity
    - Frequency
    - Geometry
    - Identifier
    - LegalResource
    - LicenseDocument
    - LinguisticSystem
    - MediaType
    - MediaTypeOrExtent
    - PeriodOfTime
    - Plan
    - Policy
    - ProvenanceStatement
    - QualitativeAttribute
    - QuantitativeAttribute
    - Resource
    - RightsStatement
    - Role
    - Standard
    - SupportiveEntity
    - Surrounding
    - TimeInstant
    range: string
  description:
    name: description
    description: This slot is described in more detail within the class in which it
      is used.
    from_schema: https://w3id.org/nfdi4cat/coremeta4cat
    rank: 1000
    slot_uri: dcterms:description
    alias: description
    owner: AtomicLayerDeposition
    domain_of:
    - Activity
    - AgenticEntity
    - Any
    - Attribution
    - Catalogue
    - CatalogueRecord
    - ChecksumAlgorithm
    - Concept
    - ConceptScheme
    - DataService
    - Dataset
    - DatasetSeries
    - Distribution
    - Document
    - Entity
    - Frequency
    - Geometry
    - Identifier
    - LegalResource
    - LicenseDocument
    - LinguisticSystem
    - MediaType
    - MediaTypeOrExtent
    - PeriodOfTime
    - Plan
    - Policy
    - ProvenanceStatement
    - QualitativeAttribute
    - QuantitativeAttribute
    - Resource
    - RightsStatement
    - Role
    - Standard
    - SupportiveEntity
    - Surrounding
    - TimeInstant
    range: string
  type:
    name: type
    description: This slot is described in more detail within the class in which it
      is used.
    from_schema: https://w3id.org/nfdi4cat/coremeta4cat
    rank: 1000
    slot_uri: dcterms:type
    alias: type
    owner: AtomicLayerDeposition
    domain_of:
    - Agent
    - ClassifierMixin
    - Dataset
    - LicenseDocument
    range: DefinedTerm
    inlined: true
  rdf_type:
    name: rdf_type
    description: The slot to specify the ontology class that is instantiated by an
      entity.
    in_subset:
    - domain_agnostic_core
    from_schema: https://w3id.org/nfdi4cat/coremeta4cat
    rank: 1000
    slot_uri: rdf:type
    alias: rdf_type
    owner: AtomicLayerDeposition
    domain_of:
    - ClassifierMixin
    range: DefinedTerm
    recommended: true
    inlined: true
class_uri: coremeta4cat:AtomicLayerDeposition